FAQ - Individual Standards

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Individual Standards

Does SEMI have standards for Photovoltaic (PV) applications?

Check PV Standards for the latest publications. For the latest committee information, visit SEMI Standards.

Does SEMI have standards for use in the High Brightness LED industry?

Yes. Check the latest HB-LED volume. For the latest committee information, visit  SEMI Standards.

How about SEMI Standards for the Three-dimensional Stacked Integrated Circuits (3DS-IC) industry?

Check the latest 3DS-IC volume. For the latest committee information, visit  SEMI Standards..

Does SEMI have accreditation or certification for S2?

SEMI does not perform accreditation or provide certification for SEMI S2. We do not maintain listings of accredited third party evaluators. The third-party evaluators are consultants who perform safety evaluation for semiconductor manufacturing equipment. These consultants are “self-declared” evaluators who are considered professionals and experts in the fields of safety, loss control, engineering, industrial hygiene, fire prevention, product safety, etc.

For information on listings or services of third party evaluators, the Internet provides links to the companies who conduct S2 evaluation. Please type “SEMI S2 Certification” or you may visit our Web site and search under Membership Directory.

Does SEMI have standards for ergonomics?

SEMI S8 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing equipment. The purpose of these guidelines is to promote compatibility between the user and the equipment in the manufacturing environment.

Is there a SEMI Standards for CE Marking that describes CE compliance?

SEMI Standards do not cover CE Marking. The CE Marking was mandated under the European Union Directives.

European Union Directives

On January 1, 1995 a set of European Union (EU) Directives came into effect requiring the "CE" mark on a wide range of products entering European Union member states. The term "European Union" refers to the European Community, EC, or the Common Market. The change to European Union is a result of the Maastricht Treaty.

The intent of the EU directives is to eliminate non-tariff barriers to trade and to assure that products flowing throughout the EU comply with general safety and environmental norms. An EU Directive sets a norm. Member states are under legal obligation to implement the Directives.

SEMI has been following European Directives that impact SEMI Members and Business Affiliates. The primary European Directives requiring CE marking that we have been following are:

Three Major Directives:

  • Machinery Directive
  • Electromagnetic Compatibility Directive
  • Low Voltage Directive

For more information on CE Marking, visit the SEMI Advocacy webpage for CE Marking.

Does SEMI maintain listings of approved NRTL to carry our third party assessment for S2?

NRTL stands for Nationally Recognized Testing Laboratory. NRTLs are third-party organizations recognized by OSHA as having the capability to provide product safety testing and certification services to the manufacturers of a wide range of products for use in the American workplace.

The testing and certifications are based on product safety standards developed by U.S.-based standards developing organizations.

SEMI does not maintain listings of approved NRTL laboratory.

For more information, please visit OSHA website.

Does SEMI have a list of companies that provide SEMI F47 conformance testing services?

SEMI does not maintain list of companies that provide testing services in conformance with SEMI F47. We recommend that you search the Internet and look for laboratories that do “SEMI F47 Testing or conformance”. These are self-declared consultants who perform the testing and are not in anyway connected with us or accredited by SEMI.

Which SEMI Standards define specification for polished single crystal silicon wafer or polycrystalline silicon?

SEMI M1 - Specifications for Polished Single Crystal Silicon Wafers

This specification provides the essential dimensional and certain other common characteristics of silicon wafers, including polished wafers as well as substrates for epitaxial and certain other kinds of silicon wafers.

These specifications cover ordering information and certain requirements for high-purity, single crystal polished silicon wafers used in semiconductor device and integrated circuit manufacturing or as substrates (or starting wafers) for other kinds of wafers, including epitaxial, annealed, and SOI wafers.

Wafer sizes include 2 inch, 3 inch, 100, 125, 150, 200, 300, and 450 mm.

SEMI M16 - Specification for Polycrystalline Silicon

This specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots. Such ingots are sliced into wafers that are subsequently used for the production of semiconductor devices, integrated circuits, and other microelectronic components including microelectromechanical systems (MEMS).

Are there SEMI Standards for 450 mm wafer generation?

Is there a SEMI Standards for measuring equipment failure, downtime, and performance?

SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

This document establishes a common basis for communication between users and suppliers of semiconductor manufacturing equipment by providing standards for measuring RAM performance of that equipment in a manufacturing environment. It defines six basic equipment states into which all equipment conditions and periods of time must fall.

Does SEMI have standards for cleanrooms?

Other than SEMI F21 - Classification Of Airborne Molecular Contaminant Levels In Clean Environments, SEMI does not possess any specifications for cleanrooms.

The two most often specifications cited in SEMI Standards for cleanroom cleanliness are:

ISO 14644 - Cleanrooms and Associated Controlled Environments Part 1: Classification of Air Cleanliness
Federal Standard 209E - Clean Room and Work Station Requirements, Controlled Environments

Federal Standard 209E - Clean Room and Work Station Requirements, Controlled Environments is also still cited in some standards. However, please note that the U.S. General Services Administration released a notice of cancellation for this document in November 2001. In that notice, ISO 14644 Part 1 (Classification of air cleanliness) and Part 2 (Specifications for testing and monitoring to prove continued compliance with ISO 14644-1) were specifically mentioned as superseding FED-STD-209E. The full notice of cancellation is available at http://www.iest.org/

For further information regarding cleanrooms and applicable standards, we recommend contacting one or more of the following:

ISO (International Standards Organization) at http://www.iso.ch
IEC (International Electrotechnical Commission) at http://www.iec.ch
IEST (Institute of Environmental Sciences and Technology) at http://www.iest.org

Does SEMI have standards for Deionized (DI) or Ultra Pure Water?

Six (6) SEMI Standards are related to ultrapure water. SEMI PV3 is for photovoltaic cell processing application, while the other five are pertinent to the semiconductor industry.

SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

This Document is a recommended guide to evaluate the efficacy of filter elements used in ultrapure water (UPW) fluid streams, providing particle control as risk mitigation for particle contamination on the wafer.

SEMI F61- Guide for Ultrapure Water System Used in Semiconductor Processing

This guide establishes the typical definitional requirements for an ultrapure water (UPW) system used in semiconductor manufacturing. It is intended to establish a common basis for developing detailed specifications in subsequent documents concerning design, performance and certification and monitoring of UPW systems.

SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing

This guide is provided for multiple purposes. It may be used as a basis for establishing performance criteria for purchases of new UPW equipment. It may also be used internally by facility engineers to set process control parameters for the operation of their UPW systems.

SEMI F75 - Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing

This guide provide recommendations for facility engineers and other manufacturing and quality professionals who may be responsible for establishing programs to monitor and control the quality of their ultrapure water (UPW) systems through to point-of-use (POU). The guide may be used to help determine the parameters that should be monitored for UPW that is produced, distributed and used throughout the manufacturing facility, and the frequency and location of testing.

SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing

This guide establishes definitional requirements for industrial water systems that reuse water in a semiconductor manufacturing facility. It is intended to establish a common basis for developing detailed specifications in subsequent documents concerning design, performance, optimization, and monitoring of such systems.

SEMI PV3 - Guide for High Purity Water Used in Photovoltaic Cell Processing

This guide is provided for multiple purposes. It may be used as a basis for establishing performance criteria for purchases of new High Purity Water (HPW) equipment. It may also be used internally by facility engineers to set process control parameters for the operation of their HPW systems. This guide may be used by process engineers to establish reasonable expectations about the quality of the HPW being supplied to them by facilities.

Is there a SEMI Standards carrier for 200 mm wafers?

In 1994, SEMI E1.7, Specification for a 200 mm Plastic and Metal Wafer Carriers was published as a Proposed Standard. Due to the nature of a proposed standard, this standard was removed from publication in 1996, two years after its initial publication.

The standards work on an official 200 mm carrier stalled and eventually was discontinued, due to a lack of consensus on the few last details of the carrier, the number of product currently on the market at the time that would be "obsoleted" by the standard, and a shift in effort towards 300mm carriers.

In 2009, SEMI E1 (Specification for Open Plastic and Metal Wafer Carriers) was rewritten to include dimensions for all of the carriers standardized from 3 inch to 150 mm. These dimensions were previously published as SEMI E1.1 through SEMI E1.5. There has been no change in these dimensions.

SEMI E1 also includes, as Related Information (not as a Specification), dimensions from the SEMI E1.7 Proposed Standard. This information is added for historical interest. It is not an official part of SEMI E1.

Can SEMI provide an electronic version of the "SEMI-OCR" Character Set?

AUX015 SEMI Optical Character Reading (OCR) Character Outlines, free of charge, provides “single-density” mode, using a dot matrix of 5 dots horizontal and 9 dots vertical and “double-density” mode, using a dot matrix of 10 dots horizontal and 18 dots vertical.

This is the only character set provided by SEMI OCR. One may use this font style as wished. Unfortunately, many standards users have a perception that SEMI has a separate Optical Character Recognition font styles.

Is there a SEMI Standards for bar code?

The following SEMI Standards are related to bar code:

SEMI G71 - Specification for Barcode Marking of Intermediate Containers for Packaging Materials

This specification describes a common format, content, size, and location for printed, machine-readable labels on an intermediate container of materials used for semiconductor packaging. This specification provides for a smooth transition from existing traceability and labeling procedures to a comprehensive, unified system envisioned for the future.

SEMI G83 - Specification for Bar Code Marking of Product Packages

This specification describes the area needed for adding bar codes, the bar code specifications, and the code notation format for direct and indirect material product packages (unit packs) for semiconductor packaging. The following are the goals of this specification: Quality control using computers; Prevention of mistakes created by human error; Material control at the manufacturing site. The following is not a goal of this specification: Purchasing control.

Other related Standards:

SEMI M12 - Specification for Serial Alphanumeric Marking of the Front Surface of Wafers
SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers
SEMI T8 - Specification for Marking of Glass Flat Panel Display Substrates with a Two-dimensional Matrix Code Symbol
SEMI T9 - Specification for Marking of Metal Lead-frame Strips with a Two-dimensional Data Matrix Code Symbol
SEMI T11 - Specification for Marking of Hard Surface Reticle Substrates

How are SEMI Process Chemicals Standards designated?

Chemical Standards (Specifications) are designated by “grade” and Guidelines by “tiers”




>1.2 µm



0.8 to 1.2 µm



0.2 to 0.8 µm



0.09 to 0.2 µm



< 0.09 µm



Purity levels in Specifications can be validated by commonly accepted analytical quality control methods. Guidelines reflect future chemical-purity needs for which a complete set of test methods is not generally available when the guideline is being developed.

There are also some Guidelines designated "VLSI grade." These Guidelines also describe a chemical purity level appropriate to produce semiconductor devices with geometries between 0.8 and 1.2 µm.

Where can I find the ASTM F1.06 documents that were transferred to SEMI?

SEMI acquired rights to 76 ASTM F1.06 standards in March 2003. These Standards have been reviewed and revised through the SEMI ballot process. The committee voted to withdraw some of these Standards because they are obsolete. The rest have been published in the Silicon Materials & Process Control volume, with the letter designation of MF. They are all available online through SEMIViews, or can be purchased individually through the SEMI Web site. Please visit the store for product purchase information.

Can I still purchase an older version of a SEMI Standards?

Yes. Superseded and Replaced Standards are available for purchase, except those that have been removed due to a technical flaw or legal issue. Superseded and Replaced Standards can be purchased individually through the SEMI Web site, located in the Historical section. If you cannot locate a document, email Shannon Austin at saustin@semi.org.

Can I still purchase a SEMI Standards that has been withdrawn?

Yes. Withdrawn Standards are available for purchase, except those that have been removed due to a technical flaw or legal issue. Withdrawn Standards can be purchased individually through the SEMI Web site, located in the Historical section. If you cannot locate a document, email Shannon Austin at saustin@semi.org.


Can I still purchase an inactive SEMI Standards? What does ‘Inactive’ mean?

Yes. Inactive Standards are available in SEMIViews, and can also be purchased individually through the SEMI Web site. Inactive Standards are still valid, they are defined as overdue for 5-year review and are not currently supported by the technical committee.

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