ASMC 2019 - Session 9

Wednesday, May 8

Session 9 – Factory Optimization I

Chairs: Jagdish Prasad, Silfex; Stefan Radloff, Intel; Misty Thompson, Texas Instrument
The challenges of current and future semiconductor process technologies require an increased application of modelling, simulation and optimization technologies. Utilization of cross industry best practices and automated decision-making and execution will enable improved factory efficiency. Presentations in this session will discuss solutions to improve automation and equipment in chip factories.

9.1 Evaluating Automated Guided Vehicle System Characteristics in Semiconductor Fab Automated Material Handling Systems
Karl-Benedikt Reith, Martin Däumler, Patrick Boden, Sebastian Rank, Thorsten Schmidt, Technische Universität Dresden; Ralf Hupfer, GLOBALFOUNDRIES

9.2 Cloud-based Computation for Skipping Lots in Metrology (Student Paper)
Étienne Le Quéré, Stéphane Dauzère-Pérès, École des Mines de Saint-Étienne; Cédric Maufront, Guillaume Bugnon, Nicolas Ferrandini, Stéphane Astie, Xavier Michalet, Soitec

9.3   A Decision Support System for a Critical Time Constraint Tunnel (Student Paper)
Antoine Perraudat, Alexandre Lima, Stéphane Dauzère-Pérès, Université Clermont Auvergne; Philippe Vialletelle, STMicroelectronics

9.4 A Planning Approach for an Effective Digitization of Mature Semiconductor Production Systems
Sophia Keil, Fabian Lindner, Zittau/Goerlitz University of Applied Sciences; Germar Schneider, Infineon Technologies Dresden

2:05 Networking Break