FRT is one of the world’s leading suppliers of 3D metrology for R&D and high-volume manufacturing. The FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics.
A third generation ultra stable platform and complete in-house software are the result of more than 20 years of experience. The FRT multi-sensor concept and hybrid metrology options are empowering production lines around the world.
The applications are topography, step height, roughness, TTV, bow, warp, stress, TSV, layer and stack thickness, overlay and CD – and many other parameters, contact-free and fully automated. Various measuring methods can be combined with point, line and field of view sensors and as well as film thickness sensors and atomic force microscope in one metrology tool and within one recipe.